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浅析真空镀膜技术的现状及进展 被引量:5

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摘要 本文主要对真空镀膜技术的现状以及发展方向进行探讨,简单介绍在真空镀膜工作中常使用的镀膜基材和镀膜材料,以及真空镀膜涂料的品种、优点以及发展方向。
出处 《科技风》 2014年第8期272-272,共1页
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  • 1贾嘉.溅射法制备纳米薄膜材料及进展[J].半导体技术,2004,29(7):70-73. 被引量:16
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