高性能多功能超高真空金属二次电子发射特性测试平台

Lab-Built Test-Stand for Secondary Electron Emission of Metals in Ultra-High Vacuum

介绍了一套高性能多功能的超高真空金属二次电子发射特性测试平台。该平台包含了超高真空系统、测试系统、原位表面处理系统和控制与数据处理系统四个部分,实现了在10-8Pa的超高真空下准确测试金属材料的二次电子发射特性。该平台采用了偏压电流法和收集极法两种测试二次电子产额的方法,配置了全自动控制的双通道筒镜型电子能谱仪测试二次电子能谱,集成了氩离子清洗和热处理部件研究表面状况对二次电子发射特性的影响。在测试原理及功能介绍的基础上,展示了二次电子发射特性的典型测试结果。

The multi-functional test-stand was designed and constructed to evaluate characteristics of secondary electron emission of metals in ultrahigh vacuum（ UHV）,such as its emission yield（ SEY） and its energy spectrum. The four parts of the lab-built multi-functional test-stand include a dedicated UHV vacuum system,in-situ sample preparation unit,measurement unit,and control unitwith auxiliary functions of data acquisition,storage,processing, and display. The secondary electron emission yield is measured at 10- 8Pa in two ways,one is to bias negatively the sample,the other is to directly collect the secondary electrons with a Faraday cup; and its energy spectrum is evaluated with an automatic dual-pass energy analyzer. Besides,the in-situ sample preparation unit is capable of cleaning the surface byargon ion sputtering,and annealing the sample by resistive heating. The multifunctional test-stand has been doing a good job in ground simulation of aerospace projects.