泵送大粘度液体的双腔并联压电泵设计与试验研究

Design on Pumping High Viscosity Liquid Double-chamber Piezoelectric Pump in Parallel

为使双腔并联压电泵能够输送较大粘度的液体，设计了一种以5～7μm厚度铍青铜材料加工而成的薄片型轮式平板阀。在理论上分析了阀的过流特性，确定了影响通过阀体流量的因素，即阀自身的几何尺寸、作用在阀两侧的压力差及液体粘度对其影响，并以试验的方法确定了当阀片半径为3．25mm、阀孔半径为2．75mm时，双腔并联压电泵输出流量最好。分别以不同浓度的甘油水溶液作为试验液体，测试了在不同液体粘度、不同工作频率下双腔并联压电泵的输出流量。试验发现，随着液体粘度的增加，阀开启时的阻力增大，开启量变小，阀和压电振子之间振动相位差不断加大，截止性能变差，压电泵净输出量减少。在液体粘度μ＝1．311mPa·s时，压电泵的最大输出流量可达1300mL/min，而当液体粘度μ＝234．6mPa·s时，压电泵的最大输出流量仅为30 mL/min左右。试验结果为获得双腔并联压电泵输送不同粘度液体的能力提供了可靠的数据。

Inordertopumphighviscosityliquid,designinganewtypeofdouble-chamberpiezoelectricpumpinparallelwitha sheet type wheel flat valve processed by beryllium bronze of 5 ~7μm thickness.Theoretically analyzing the valve static overcurrent characteristics and determining influencing factors of flow-rate through valve,namely the valve size,acting on the valve pressure difference of both sides and the viscosity of the fluid.Double-chamber piezoelectric pump in parallel output flow-rate is best when the valve plate radius is 3.25mm and valve hole radius is 2.75mm determined by experimental method,.In order to obtain Influ-ence of liquid viscosity on output performance of double-chamber piezoelectric pump in parallel,testing output flow-rate in the dif-ferent operating frequencies of the different liquid viscosity with different concentrations of glycerol aqueous solution as the test liquid.The experiment results show that the resistance increased greatly as increase of the viscosity of the fluid increased ,valve opening quantity get smaller.With the phase difference between the vibration of the valve and the vibrator continue to increase , the net output performance of the pump is reduced.Under the conditions of 1.311mPa·s liquid viscosity,the maximum pump output flow rate up to 1300mL/min,but under the conditions of 234.6mPa·s,pumping output flow rate is only 30mL/min.Test results provide reliable data for obtaining the double-chamber piezoelectric pump in parallel capacity of the different viscosity fluid.