摘要
为了实现非球柱面镜的高精度加工,解决这一领域面临的难题,对非球柱面镜的加工和检测方法进行了深入的研究。采用古典与现代制造技术相结合的方法,研制了用于光束整形的异形元件,该异形元件是由非球柱面镜和柱面镜组成。针对非球柱面镜面型难以控制的问题,给出了独特的抛光模设计。结果表明:经过轮廓仪检测面型精度为0.848 7μm,达到了图纸精度,满足了光学元件的使用要求。
In order to realize the aspheric cylindrical mirror of high precision processing,and solve the difficult problems in this field,the aspheric cylindrical mirror processing and testing methods are deeply researched. Classical and modern processing methods are adopted and odd-form component for beam shaping system are fabricated in this paper,which is composed of aspheric cylindrical mirror and cylindrical mirror. A unique production of polishing disk is proposed aiming at the problem that the surface shape is controlled hardly. Results show that the surface error is 0. 848 7μm by the profilometer detecting,which can meet the operational requirement of the optical elements.
出处
《中国光学》
EI
CAS
2014年第3期469-475,共7页
Chinese Optics
基金
广东省教育部产学研结合资助项目(No.2010B090400048)
关键词
非球柱面镜
加工
检测
面形误差
aspheric cylindrical
processing
testing
surface error
