簧片扭摆弱力测量系统的设计研究

Design of Torsion Pendulum to Measure Weak Force

基于静电力测量原理,设计了一种簧片扭摆弱力测量系统,它主要由扭摆、信号检测系统和信号采集系统组成。该系统最大的优点是扭摆可以整体加工制作,框架、簧片、连接杆和检验质量是一个统一的整体,所以它们相互之间没有滑动,没有摩擦,具有很高的灵敏度。根据设计参数,如果系统的输出电压噪声为10 mV,那么在140μN的动态范围内,所设计的簧片扭摆弱力测量系统的测量精度能够达到1.4 nN。

Torsion pendulum to measure weak force is designed based on the principle of electrostatic force measurement. It is made up of torsional balance,signal detection system and signal gathering system. Its strongpoint is that it is monolithic with the links,and the flexure hinge is highly energy-efficient since it has zero friction and backlash. If the noise of the system is 10 mV,the resolution can come to 1.4 nN with a dynamic range of 140 μN.