水介质动态压力传感器设计与实现

Design and Implementation of High Frequency Dynamic Pressure Sensor

针对水介质动态压力信号测量,从高固有频率薄膜应变式敏感元件、机械结构、信号调理电路三个方面详细阐述了水介质动态压力传感器的设计与分析方法,结合实际应用经验优化了传感器动态性能,并利用正弦压力校准系统对所设计的压力传感器进行了动态测试。测试结果表明,该压力传感器在0Hz^5kHz频带内的不平度小于±3dB,达到了5kHz的动态频率响应要求。

Based on the dynamic pressure signal measurement,the design and analysis method of high frequency dynamic pressure sensor is elaborated in the aspects of high inherent frequency thin film strain sensitive element,mechanical structure and signal disposal circuit.Combined with the actual application experience the sensor＇s dynamic performance is optimized,and the sinusoidal pressure calibration system is used for the dynamic test of pressure sensor.The test results show that the pressure sensor＇s roughness is less than 3dB in 0Hz ～ 5kHz frequency band,and the dynamic frequency response satisfies the requirement of 5kHz.