电润湿纳米压印光刻胶的制备及其特性研究

Preparation of Electrowetting Nanoimprinting Photoresist and Their Properties

实现对微纳米模板的充分填充是传统纳米压印胶的一个重要难题。本文设计和制备了一种类离子液体的丙烯酸酯化合物I-M-PET3A。以N,N-二甲基乙醇胺为助引发剂,二苯甲酮为光敏剂,丙烯酸羟丙酯为活性稀释剂与I-M-PET3A共混制备的纳米压印胶具有相对小的粘度(530mpa·s)和好的导电性能(33.98μs/cm),从而表现出良好的电润湿特性。在200V,10Hz方波交流电额外施加的电毛细驱动下,复配的压印胶大约10s即可充分填充30μm×120μm的微槽。经光固化和脱模后能保持完美的微纳米图案。该纳米压印胶同时具有光固化和电润湿特性,为高性能纳米压印胶的开发提供了新思路。

An important problem for traditional nanoimprint resin is that they are difficult to completely fill the micro- and nanocavily. To address this issue, an ionic liquid-type acrylate compound （termed as I-M-PET3A） was synthesized and used to prepare nanoimprint resin with N,N-dimethyl ethanolamine as coinitiator, benzophenone as photosensitizers and hydroxypropyl acrylate as reactive diluents. The nanoimprint resin have a relatively low viscosity （530 mpa· s） and good conductivity （33.98 μs· cm-1） , therefore exhibiting excellent electrowetting properties. It can totally fill the 30 μm × 120 μm microgrooves in 10 s under a square wave alternating current （200V, 10Hz）. And terrific micropatterns could be obtained after being light-cured and demoulded. This nanoimprint resin with both light-cured and electrowetting properties provide a new way to develop high- performance nanoimprint resin.