Ti-Mo吸气材料注射成形脱脂工艺的研究

Study on debinding process of Ti-Mo getter matertial by powder injection molding

采用粉末注射成形技术制备 Ti-Mo 合金吸气材料。研究了脱脂工艺对坯体质量、微观结构及其元件性能的影响。讨论了化学脱脂中的溶剂、温度、时间对坯体脱脂率的影响,较优的脱脂溶剂为三氯乙烯,在脱脂温度为50℃、脱脂时间为6 h 条件下,脱脂率达71.55%；通过DTA/TG曲线对热脱脂工艺进行了优化,确定了热脱脂工艺参数为室温-120℃,升温速率10℃/min；120～230℃,升温速率5℃/min；230～500℃,升温速率2℃/min,保温60 min；再经过800℃烧结工艺,制备出性能优异的 Ti-Mo 吸气剂元件,吸气性能特征为S10=738.5 mL/s,Q120=995.6 Pa·mL。

Ti-Mo alloy powder was fabricated for the getter by metal powder inj ection molding technique.The effects of debinding process on sample quality,microstructure and component properties were investigated.The effects of different solvent,temperature and time in chemical debinding process on debinding rate were dis-cussed.The optimal debinding solvent was trichloroethylene.The degreasing rate was 7 1 .5 5% after dipping in the trichloroethylene for 6 h at 50 ℃.According to DTA/TG curves,thermal debinding technology was opti-mized,debinding technology parameters of powder inj ection molding were confirmed that the heating rate was separately 10,5 and 2 ℃/min under periods of 25 to 120 ℃,120 to 230 ℃,and 230 to 500 ℃;And then the temperature was kept 500 ℃ for 60 min;at last sintering process was executed at the temperature of 800 ℃.Ti-Mo getter devices made by powder inj ection molding technique exhibited the excellent properties.Characteris-tics sorption rate and capacity were S10= 738.5 mL/s and Q120= 995.6 Pa·mL,respectively.