摘要
The turn-on speed of electrostatic discharge （ESD） protection devices is very important for the protection of the ultrathin gate oxide. A double trigger silicon controlled rectifier device （DTSCR） can be used effectively for ESD protection because it can turn on relatively quickly. The turn-on process of the DTSCR is first studied, and a formula for calculating the turn-on time of the DTSCR is derived. It is found that the turn-on time of the DTSCR is determined mainly by the base transit time of the parasitic p-n-p and n-p-n transistors. Using the variation lateral base doping （VLBD） structure can reduce the base transit time, and a novel DTSCR device with a VLBD structure （VLBD_DTSCR） is proposed for ESD protection applications. The static-state and turn-on characteristics of the VLBD DTSCR device are simulated. The simulation results show that the VLBD structure can introduce a built-in electric field in the base region of the parasitic n-p-n and p--n-p bipolar transistors to accelerate the transport of free-carriers through the base region. In the same process and layout area, the turn-on time of the VLBD DTSCR device is at least 27% less than that of the DTSCR device with the traditional uniform base doping under the same value of the trigger current.
The turn-on speed of electrostatic discharge （ESD） protection devices is very important for the protection of the ultrathin gate oxide. A double trigger silicon controlled rectifier device （DTSCR） can be used effectively for ESD protection because it can turn on relatively quickly. The turn-on process of the DTSCR is first studied, and a formula for calculating the turn-on time of the DTSCR is derived. It is found that the turn-on time of the DTSCR is determined mainly by the base transit time of the parasitic p-n-p and n-p-n transistors. Using the variation lateral base doping （VLBD） structure can reduce the base transit time, and a novel DTSCR device with a VLBD structure （VLBD_DTSCR） is proposed for ESD protection applications. The static-state and turn-on characteristics of the VLBD DTSCR device are simulated. The simulation results show that the VLBD structure can introduce a built-in electric field in the base region of the parasitic n-p-n and p--n-p bipolar transistors to accelerate the transport of free-carriers through the base region. In the same process and layout area, the turn-on time of the VLBD DTSCR device is at least 27% less than that of the DTSCR device with the traditional uniform base doping under the same value of the trigger current.
基金
Project supported by the Chinese Universities Scientific Fund(No.ZYGX2011J030)
