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Flexible Ti-Ni-N Thin Films Prepared by Magnetron Sputtering 被引量:1

Flexible Ti-Ni-N Thin Films Prepared by Magnetron Sputtering
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出处 《材料科学与工程(中英文A版)》 2014年第1期27-33,共7页 Journal of Materials Science and Engineering A
关键词 磁控溅射法 钛镍 薄膜 制备 反应磁控溅射 弯曲开裂 杨氏模量 弹性涂料 Flexible coatings, hardness, Young's modulus, elastic recovery, macrostress, resistance to cracking.
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参考文献16

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