沉积温度对ZnO薄膜结构形貌及光学性能的影响

Effect of deposition temperature on microstructure and optical properties of ZnO thin films

以Zn（NO3）2·6H2O为前驱体,采用超声喷雾热解法在玻璃衬底上沉积了ZnO薄膜,采用X射线衍射（XRD）、扫描电子显微镜（SEM）、紫外光谱仪（UVS）等对所得ZnO薄膜进行表征,研究了沉积温度对ZnO薄膜的结构、微观形貌及光学性能的影响。结果表明,沉积温度为500℃时所制备的薄膜质量最佳,形成的是六角纤锌矿ZnO结构,且薄膜沿（002）晶面择优取向生长显著,薄膜表面光滑致密,晶粒细小均匀,尺寸在50～60nm。薄膜表现出良好的光学性能,可见光透过率可达87%。

ZnO thin films were deposited on the glass substrate using zinc nitrate as precursor by the ultrasonic spray pyrolysis method.The effect of the deposition temperature on crystalline structure, morphology and optical properties of the films was studied with X ray diffraction,scanning electron microscopy and ultraviolet spectrometer.The superior ZnO thin film was prepared when the deposition temperature was at 500℃,and the film was dense,smooth and homogenous surface with the hexagonal wurtzite polycrystalline structure.The film exhibit highly orientation of（002）to the substrate surface,the crystallite size of ZnO films is about 50to 60nm.The film has good optical properties with visible light transmittance as high as 87%.