摘要
介绍了微组装设备技术发展现状,重点论述了微组装关键设备工程化技术、先进微组装工艺技术和微组装工艺设备标准规范等微组装设备技术平台研究。通过该技术平台的研究,提升了微组装关键设备的先进性、稳定性和工艺系统集成能力。
In this paper, the developing actuality of Microassemly equipment technology were introduced. And Study on Technology Platform were described in detail, including Microassembly process equipment's technology , advanced Microassembly process technology,constituting standard of Microassembly processequipment.The research ofthisTechnology Platform upgradesthe stability and Process System Integrating ofMicroassembly equipment.
出处
《电子工业专用设备》
2014年第1期8-12,共5页
Equipment for Electronic Products Manufacturing
关键词
微组装工艺设备
工艺系统集成
技术平台
Microassembly process equipm ent
Process system integrating
Technology platform
