摘要
研究了氮在常温 (<1 0 0°C)、1 50°C、2 50°C和 350°C注入α- Fe后的深度分布 ,以及常温注入后再经 1 50°C或 2 50°C保温 1 h退火后氮的深度分布和 TEM组织分析 ,结合理论计算结果讨论了注入温度对氮分布的影响。结果表明 :氮分布特征取决于离子与基体原子级联碰撞的弹道式混合作用。
The nitrogen distribution of pure iron implanted by N at room temperature, 150°C, 250°C, 350°C and annealed at 150°C, 250°C is studied The effects of implantation temperature on N depth profiles are further discussed based on the analytical results of TEM and the N theoretical distribution The shape of N depth profiles depends strongly on implantation temperature Ballistic mixing effect, matrix trapping effect, diffusing effect in turn govern the N profiling results in the N containing layer of α Fe as implantation temperature elevates
出处
《机械工程材料》
CAS
CSCD
北大核心
2001年第1期15-17,39,共4页
Materials For Mechanical Engineering
基金
中国工程物理研究院科学技术基金资助项目!(990 340 )
关键词
离子注入
温度
氮分布
Α-FE
热效应
lon implantation
temperature
nitrogen distribution
α Fe
