摘要
针对激光直写光刻系统设计整形衍射光学元件 ( DOE) ,对写入焦斑的整形进行了研究。提出对不同焦距写入物镜下的焦斑 ,利用同一个 DOE加以整形的方法。模拟表明 :整形后焦斑的面形和边缘显著改善 ,衍射效率高于实用指标 ,提供一种改善系统分辨能力的有效途径。
The diffractive optical elements (DOE) with shaping the focused spot for laser writing system are designed , while discussing their performances for shaping laser writing spot. An efficient way of using a DOE to shape the laser writing spot under the objectives with various focal lengths is presented. The simulating results indicate that the spot-shaped sizes is only more twice than the diffraction limited spot sizes under this system, its diffraction efficiency is about 71.38% and the edges of the uniform area become dramatically sharper than the result without DOE.
出处
《光学精密工程》
EI
CAS
CSCD
2001年第1期14-18,共5页
Optics and Precision Engineering
基金
应用光学国家重点实验室基金资助项目! (DA 0 0 Q0 5 D)
