摘要
介绍了一种基于迈克耳孙干涉仪的精密角度测量系统 ,该系统利用迈克耳孙干涉仪在几何量测量中的干涉测量技术 ,通过转换将角位移转换为可以反映干涉光路中光程差变化的线位移 ,并通过相应电路对干涉条纹进行处理 ,从而实现了对大转角的精密测量。与以往类似系统相比 ,该系统具有结构简单、误差恒定、测量精度高、测角范围大、易于数字化等特点。同时 ,文章还对系统的构成原理、设计注意事项和精度等作了有关的理论分析。
A precise angle measurement system was presented based on Malchlson interferometer technology. This system took advantage of the Malchlson interferometer measurement technology used in the geometrical sense measurement and realized the exact measurement towards the big angle by changing the angle displacement to line displacement and using special circuits to subdivide and measure the interference pattern. This system has several merits such as high measurement precision, wide angle range and high digitialization compared with the other similar systems. The principle of the system and the matters should be pard attention to when design this system were prsented,also, precision analysis about the system was given.
出处
《光学精密工程》
EI
CAS
CSCD
2001年第1期85-88,共4页
Optics and Precision Engineering
基金
中国科学院创新工程经费资助
