水溶性有机去膜液的主要成分及其作用原理概述

Main ingredients and their working mechanism in water soluble organic fi lm stripper

文章在大量的文献基础上总结了水溶性有机去膜液的主要成分,包括有机胺、有机溶剂、加速剂、缓蚀剂和消泡剂,并介绍了各种成分在去膜过程中的作用原理。重点介绍应用于去膜液中的各类缓蚀剂及其缓蚀机理,缓蚀剂包括含氮化合物、含硫化合物、有机酸、芳香族羟基化合物等。

In this article, we introduce the organic amine resist strippers, including the main ingredients and their working mechanism. The main ingredients include organic amines, organic solvents, inhibitors, accelerators and defoamers. The emphasis of this article is discussion about different kinds of inhibitors used in the strippers and their anti-corrosive mechanism. Inhibitors used in the strippers are as following：benzotriazole-based compounds, aromatic hydroxy compounds, mercapto group containing compound etc.