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强流金属离子注入 被引量：3

High Flux Metal Ion Implantation
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摘要 金属等离子体浸没注入 (MEPIII)技术与金属蒸气真空弧 (MEVVA)源注入技术有相同之处 ,也有各自不同的特点。采用两种方法进行钛离子注入硅 ,RBS方法分析注入层 ,并对两种注入技术予以比较。 MEVVA ion implantation is similar to metal plasma immersion ion implantation.The Ti ion implantation into silicon substrat was conducted with the two ion implantation configurations.The RBS was used to analyze the implanted layers and two techniques were compared.
作者 张涛 宋教花 张荟星 张孝吉 汤宝寅 朱剑豪 Monteiro O R Brown I G
机构地区 北京师范大学射线束技术与材料改性教育部重点实验室 香港城市大学物理材料系 美国加州大学伯克利国家试验室
出处 《微细加工技术》 2001年第1期22-25,共4页 Microfabrication Technology
基金 86 3计划项目! (86 3 715 0 0 8 0 0 4 0 )
关键词 金属离子注入 MEVVA MEPIII 金属蒸气真空弧 metal ion implantation MEVVA MEPIII
分类号 TN305.3 [电子电信—物理电子学]
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参考文献4

  • 1[1]Brown I G, Gavin J E, Macgill R E. High current ion source[J ]. Appl Phys Lett, 1985,47 (4): 358.
  • 2[2]Conrad J R. Sheath thickness and potential profiles of ion-matrix sheaths for cylindrical and spherical electrodes[J].J Appl Phys,1987,62:777.
  • 3[3]Brown I G, Godechot X. Vacuum arc ion charge-state distribution[ R]. IEEE Trans Plasma Sci, 1991,19:713.
  • 4[4]Biersack J P. Three dimensional distribution of ion range and damage including recoil transport. [J]. NuclInstr Methods B, 1987, i9/20:32.

同被引文献32

  • 1Youssef A A,Budzynski P,Filiks J,et al.Tribological properties of Ti-implanted duralumin and stainless steel[J].Surface and Coatings Technology,2000,123:84-91.
  • 2Huang C T,Duh J G.Nitrogen implantation of Ti and Ti+Al films deposited on tool steel[J].Vacuum,1995,46:1465-1472.
  • 3Rodríguez Rafael J,Sanz Antonio L,Medrano Angel M.The search for new applications of ion implantation treatments[J].Surface and Coatings Technology,1996,84:594-599
  • 4Lambert B K,Woods R H.A performance study of plasma source ion-implanted tools versus high-speed steel tools[J].Nuclear Instruments and Methods in Physics Research Section B:Beam Interactions with Materials and Atoms,1997,127-128:1004-1007.
  • 5Byeli A V,Lobodaeva O V,Shykh S K,Kukareko V A.Solid-state amorphization of a tool steel by high-current-density,low-energy nitrogen ion implantation[J].Nuclear Instruments and Methods in Physics Research Section B:Beam Interactions with Materials and Atoms,1995,103:533-536
  • 6Narojczyk J,Werner Z and Piekoszewski J.Analysis of the wear process of nitrogen implanted HSS stamping dies[J].Vacuum,2001,63:691-695.
  • 7Hirvonen J P,Harskamp F,Torri P,et al.Carbon and metal-carbon implantations into tool steels for improved tribological performance[J].Nuclear Instruments and Methods in Physics Research B,1997,127/128:922-929.
  • 8Budzynski P,Tarkowski P,Jartych E,et al.Evolution of mechanical properties in tool steel implanted with high energy nitrogen ions[J].Vacuum,2001,63:737-742.
  • 9Li Manyuan,Knystautas E mile J and Krishnadev Madhavarao.Enhanced microhardness of four modern steels following nitrogen ion implantation[J].Surface and Coatings Technology,2001,138:220-228.
  • 10Budzynski P,Youssef A A,Kamienska B.Influence of nitrogen and titanium implantation on the tribological properties of steel[J].Vacuum,2003,70:417-421.

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微细加工技术
2001年 第1期

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