摘要
采用磁过滤阴极真空孤沉积技术对从弧源引出离子束中的大颗粒进行过滤后 ,在硅和聚合物表面进行离子注入和低能离子束沉积 ,可获得特性优异的沉积金属膜、超硬膜 (类金刚石 ,CN膜 )、陶瓷膜 (TiN ,TiC)等。电子显微镜观察表明 ,大颗粒已被过滤 ,表面结构致密。由于先进行离子注入 ,在基体表面预先形成了过渡层 ,从而改善了沉积膜的粘合特性 ,膜与基体的粘合特性有了明显提高。测量结果表明 ,沉积膜的硬度、抗磨损和抗腐蚀特性均有了明显提高。非晶金刚石薄膜表面硬度可达到5
The compact thin films on silicon and polymer were implanted by metal Vacuum vapor are (MEVVA) ion implantorl and deposited by magnetic Filter Cathode Vacuum Arc Deposition,The advanced metal,super?hardening(DLC and CN film) and ceramic(Tic,Tin et al)films were obtained. The observations by SEM show that the clusters were filtered using the magnetic filter.The compact film was obtained.The transition layer was formed under the film due to pre?implantation.So that the adhesion of the film to the subtract obviously enhanced.The results show that the mechanical and chemical properties (such as hardness,abrasion resistance and corrosion resistarce)were extremely improved The hardness of diamond?like amorphous carbon(DLC)film is about 56GPa.
出处
《微细加工技术》
2001年第1期45-49,共5页
Microfabrication Technology
基金
国家自然科学基金(59671051)
国家863计划资助
关键词
磁过滤
离子沉积
聚合物
类金刚石膜
Magnetic filter
Ion deposition
Polymer
Diamond-like amorphous carbon(DLC)film
