摘要
在玻璃基底上制备透明导电氧化物薄膜(简称TCO薄膜)的方法很多,本文主要论述了喷雾热分解法、真空蒸发镀膜法、磁控溅射法、化学气相沉积法以及溶胶-凝胶法,并对其在工业化应用中的优缺点进行了分析。对TCO薄膜应用进展情况、磁控溅技术和AZO薄膜的发展应用前景进行了研究和展望。
There are many ways for preparation of transparent conducting thin film on glass substrates,the paper discussed the various preparation methods of transparent conductive film including spray-pyrolysis,vacuum evaporation,magnetron sputtering,chemical vapor deposition and sol-gel,and their merits and demerits on industrial application were analyzed.The paper also looked forward the progress of the application of transparent conductive thin film,the process of production status of magnetron sputtering method in TCO film,and the application developing prospect of AZO film.
出处
《新技术新工艺》
2014年第6期115-118,共4页
New Technology & New Process
关键词
玻璃基底
透明导电氧化物薄膜
制备方法
工业化生产
glass substrates
transparent conductive oxide thin film
preparation methods
industrial production
