1Cheng H H,Weng W H,Chang J H.Design and Fabrication of Cantilever Beam for Bio-sensing [C]//The 8th Cross-strait Advanced Manufacturing Technologies Workshop,Taipei,2010.
2Ansari M Z,Cho C,Kim J,et al.Comparison between Deflection and Vibration Characteristics of Rectangular and Trapezoidal profile M icrocantilevers[ J ].Sensors, 2009(9 ) : 2706-2718.
3Ansari M Z,Cho C.A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors [ J ].Sensors,2008 (8) : 7530-7544.
