氧化锆基片式NO_x气体传感器的研制

Development of a zirconia-based NO_x gas sensor

采用具有自主知识产权的制备工艺流程,制备了氧化锆基NOx气体传感器。首先配制了性能良好的5mol%-ZrO2浆料,流延成型得到了氧化锆陶瓷素坯基片,经过剪裁、冲孔、开槽、丝网印刷等工艺,制备了传感器素坯,经过1450℃2h烧结得到了氧化锆基NOx传感器。应用线性伏安法初步测试了该NOx气体传感器的性能。制备的NOx气体传感器具有良好的NOx气体响应性能。初步性能测试结果表明,传感器的电流值和NO2气体浓度之间存在着强的线性相关性,线性相关系数>99.27%,电流值在0.136A^0.142A之间,传感器的线性范围为:200ppm^2000ppm。

Zirconia-based NOx gas sensor is fabricated in the preparation process with independent intellectual property right. First, 5mol%-ZrO2 slurry with good performance is prepared, and zirconia substrate is fabricated with tape-casting method. After lamination, cutting, drilling pole, slotting, screen printing, green body of NOx sensor is made. Zirconia-based NOx gas sensor is fabricated successfully after sintered in air at 1450 ℃ for 2h. The properties of gas sensor are measured by linear sweep voltammetry. The fabricated NOx sensor has good NOx response to NOx gas. Preliminary results indicats that the current ouptputs of the sensor have good linear response relationship with the concentration of NOx withthe linearly dependent coefficient more than 99.27%, current outputs from 0.136 A to 0.142 A and the linear range from 200 ppm to 2000 ppm.