基于激光干涉仪的直线度误差测量

Measurement of Straightness Error based on Laser Interferometer

机床导轨直线度误差的测量方法有很多种,其中最常用的是水平仪法、自准直仪法和平尺法。主要介绍的是用激光干涉仪测量直线度误差的方法、原理及误差分析,并提出为减少测量误差在测量过程中应注意的几个问题。

There are many methods for measurement of straightness error,The most commonly used is the level method,autocollimator method and straight edge method,This paper mainly introduces the method,principle and error analysis of measuring straightness error by laser interference,and puts forward several problems should be paid attention to reduce the measurement error in the measuring process