流延法制备AlN陶瓷基板的研究

Tape Casting Process of Aluminium Nitride Substrate

从颗粒尺寸、浆料流体类型、干燥条件、排胶机制等方面对流延法制备ＡｌＮ陶瓷基板展开了较为系统的研究．结果表明，颗粒尺寸的不同直接影响到浆料粘度及分散剂用量．适于ＡｌＮ流延成型的浆料流体类型属于假塑性流体．保持一定的溶剂气氛有利于获得表面平整光滑的流延素坯膜．二次排胶有利于排除ＡｌＮ流延素坯膜中的残余碳．烧结后基板的断口ＳＥＭ照片表明晶粒发育较为完善，无明显开气孔，断裂模式为沿晶断裂．

Tape casting process of aluminium nitride substrate was studied from the following aspects such as particle size, the style of slurry fluid, drying condition and debinding mechanism. As a result, it was indicated that various particle size directly influenced the slurry viscosity and the amout of dispersant. The style of slurry fluid suit for tape casting of AIN was pseudo plastic. The green tape with flat and smooth surface was fabricated when keeping solvent atmosphere. Twice-debinding process was an available way to remove carbon impurity in the AIN green tape. The SEM photograph of the fractured surface of the sintered substrate showed that crystal particle grew well, open porosity did not appear and fracture mode was intercrystalline fracture.