光栅莫尔条纹数字细分技术及其误差分析

Digital Subdividing Technique for Grating MOIR Fringes and Its Error Analysis

提出在圆光栅作为分度基准的高精度测量仪器中 ,利用 A/ D转换器和单片机 ,采用软件编程的方法 ,对光栅读数头输出信号进行新的构建 ,形成一分段线性函数。实现了莫尔条纹八细分 ,从而使角度测量达到较高的精度。与传统的细分法相比 ,硬件电路简单 ,细分误差小 ,且便于误差修正。

In the high precision measurement instrument using the radial grating as the graduated reference,a linear signal is generated from the signals that are the output of the grating reader.By detecting the zero points of the generated signal and the original signals,the eight fold subdivision for MOIR fringes is carried out.Thus high precision angle measurement is realized.Compared with the common subdividing techniques,it has those advantages, such as simple electronic circuit,little subdividing error,and convenient for error correction.