离子(N_2^+,N^+)在阴极壁的能量变化规律的蒙特卡罗模拟

Monte Carlo Simulation of the Ions(N_2^+,N^+) Energy Distribution in Front of a Negative Wall

采用蒙特卡罗模拟对氮气辉光放电离子 ( N+ 2 ,N+ )轰击阴极的能量分布 ,随放电参数的变化规律进行了研究 .结果表明 :离子在阴极壁的能量分布与放电参数有关 ,即随着工作气压的增加 ,向低能区压缩 ;随着电压升高 ,向高能区蔓延 ;随气体温度的升高 ,到达阴极壁的离子 N+ 大幅度增加 ,N+ 的能量也显著提高 ;当工作气压 P<2 0 0 Pa时 ,阴极壁上 N+主要以高能粒子出现 ,但粒子数密度很低 ,随着工作气压或电压上升 ,离子

Using Monte Carlo simulation,the energy distribution of ions bombarding a nagative wall under different discharge conditions in nitrogen glow discharge is studied.It is shown that the variou of partices energy distrubution in front of negative wall depends on the electric field and the collsion frequency.The proper decrease of the gas pressure and increase of discharge voltage and gas temperature will be benificial to the improvement of the density and energy of ions reaching the cathode.