摘要
从高端芯片厂工艺需求与污染控制的角度出发,检视目前芯片厂洁净室的设计概念后,提出另外一种洁净室设计的提案构想,以为业界参考。
After reviewing the prevalent design concept of semiconductor manufacturing cleanroom and starting from the standpoints of requirement of advanced semiconductor manufacturing process and contamination control, another design proposal is proposed for advanced semiconductor manufacturing cleanroom for industrial application reference.
出处
《洁净与空调技术》
2014年第2期94-98,共5页
Contamination Control & Air-Conditioning Technology
关键词
芯片厂
洁净室
设计提案构想
Semiconductor manufacturing
Cleanroom
Design proposal
