摘要
介绍了数字式激光平面干涉仪的测量优势,阐述了利用其进行平面和球面面形的测量方法,弥补了传统平面等厚干涉仪只能测量平面平晶的不足。同时分析了影响测量结果的几个因素,并利用ZEMAX软件模拟平晶位置,观察干涉条纹。
The advantage of measurement using digital laser interferometer is introduced in the paper. The measurement method of the flat plane and the lens is explained, which makes up the deficiency of using the traditional flat equal thickness interferometer. Meanwhile it is analyzed several factors which may affect the measurement result. Simulating the standard optical flat by zemax, we can observe the change of the interference fringe.
出处
《上海计量测试》
2014年第3期23-25,共3页
Shanghai Measurement and Testing
关键词
干涉仪
平面检测
球面检测
干涉条纹
interferometer
flat plan test
lens test
interference fringe
