透射电子显微镜放大倍率校准的研究

Research on Magnification Calibration of Transmission Electron Microscope

透射电子显微镜是纳米材料微观形貌表征的一种重要仪器,可实现对微观结构纳米尺度的准确计量和表征,但是在其使用过程中,受样品质量、加速电压、电流稳定性的影响,其标称的放大倍率会产生一定的偏差。基于此,使用可溯源的标准物质对透射电子显微镜的放大倍率进行校准。校准后的TEM可溯源至晶格固定的晶面间距,具有较好的准确性,也能为以后纳米尺度的表征提供可信的依据。

Transmission electron microscopy （TEM） is an important instrument used to characterize microstructuro of nanometer materials, achieving accurate measurement and characterization of mierostrueture in nanometer scale. While in the process of operating, the nominal magnification may produce a certain deviation, which is influenced by the quality of sample, accelerating voltage and the stability of the current. Therefore, we can calibrate the magnification by using traceable certified standard materials. After calibrating, calibration factor can be traced to the fixed interplanar spacing, which has better accuracy. This work also provides a credible basis for late measurements and effectively reduces the system error.