一种X射线荧光光谱数据批处理新方法的研究

A New Automatic Analysis Method for X-Ray Fluorescence Spectrometric Qualitative Analysis

论述了一种高精度、快速的能量色散X射线荧光(EDXRF)光谱自动分析方法,包括平滑、背底扣除和寻峰等计算过程。该方法不仅可用于单幅谱图的分析,也可用于大批量数据的批处理分析。对实验室测得的微区X射线荧光光谱数据的测试结果表明,该方法同常用的高斯拟合方法相比,结果基本一致,但算法更加简单,能够有效地识别出弱峰。在当前主流配置计算机上利用该方法进行多文件连续分析时,单个文件的平均用时小于1 s,能够有效缩短数据分析时间、提高工作效率。

A method is proposed to automatically analyze energy dispersive X- ray fluorescence （EDXRF） spectrum fast and accurately. Smoothing of spectrum, background subtraction and peak searching are used in the method. It not only can be applied to analyze single spectrum, but also can be used for analyzing a large number of spectra continuously. The method is evaluated by using the spectrum analyzed by micro- X- ray fluorescence in laboratory. Compared with Gaussian fitting, the result of the symmetric zero area method is basically the same but this method has the advantage of short computing time. It can obtain a good result in the case of the spectrum with big noise and well ability of picking out the weak peaks. On ordinary PC, the average time of analyzing a single file is less than 1 s while analyzing hundreds of files using this method. It can obviously reduce the work time and improve work efficiency.