全光纤双臂微振动传感器的设计与实验

Design and Experiment of Micro-vibration Sensor with Two All-fiber Sensor Arms

微振传感器在机械制造领域、生物科学领域,以及资源和环境领域都有着广泛的应用,特别在微加工和微制造领域有十分重要的作用。为了有效检测微振动信号,给出一种基于光强调制的全光纤双臂微振动传感器的设计与实验过程,并对传感系统的工作原理做了详细介绍。系统将两臂同时作为传感臂,不仅能够有效地消除温度对振动测量的交叉影响,同时能够提高测量的精度。

Micro vibration sensor has a wide range of application in mechanical manufacturing field,biological science field,resources and environ-ment field,especially in micro machining and mi-cro manufacturing field.In order to effectively de-tect the micro vibration signal of the system,this paper presents the design and realization process of an all fiber and double arms micro vibration sensor which is based on light intensity modulation,and the working principle of the sensing system is in-troduced in detail.The sensor uses double arm structure which can effectively eliminate the cross effect caused by the change of temperature and it can also improve the accuracy of measurement.