摘要
类金刚石薄膜有着与金刚石薄膜相近的优异性能,且其制备条件相对而言比较温和,因此其制备工艺的发展一直得到广大研究者的关注。在各类型制备工艺中,低温气相沉积法由于其制备条件容易实现,生产设备可大规模生产化而得到了广泛的应用。简述了传统制备类金刚石薄膜的低温工艺,重点介绍了现阶段微波电子回旋等离子体沉积和真空磁过滤弧沉积等新型工艺发展现状。
Diamond-like films show excellent performance analogous to pure diamond films, meanwhile prepa-ration condition is mild. So researchers are committed to develop the process of preparation of diamond-like films.Low temperature gas deposition become popular during kinds of process, the condition of which could be achieved easi-ly and put into industry use. The research progress on electron cyclotron resonance chemical vapor deposition and filtered cathodic vacuum arc are introduced.
基金
国家自然科学基金(51072113)
关键词
类金刚石薄膜
气相沉积
微波电子回旋等离子体
真空磁过滤弧沉积
diamond like film, vapor deposition, electron cyclotron resonance chemical vapor deposition, fil-tered cathodic vacuum arc
