电化学沉积类金刚石薄膜阳极材料影响研究

Effects of Anode Material on Deposition of DLC Films by Liquid Electrochemical Technique

分别由石墨、铂、铜和不锈钢制成阳极，在较低温度条件（60－70℃）下电解丙酮／去离子水混合溶液沉积类金刚石薄膜。利用台阶仪、扫描电子显微镜（SEM）、能谱仪（EDX）和拉曼光谱仪（Raman）对薄膜进行表征。结果表明：由石墨、铂作阳极制备了典型的非掺杂DLC薄膜，并且石墨阳极获得的DLC薄膜生长速率高、表面平整光滑；由铜阳极制备了铜掺杂的DLC薄膜；而在相同条件下，使用不锈钢作阳极没有获得碳薄膜。因此，阳极材料对液相电化学沉积DLC薄膜的成膜速率、表面形貌、成分和结构均有显著影响。

Anodes made of graphite, Pt, Cu and stainless steel were investigated in deposition of DLC films byliquid electrochemical technique using actone/deionized water solution at low temperature （60--70℃）, respectively.The films were characterized by scanning electron microscopy （SEM）, energy dispersive X-ray spectroscopy （EDX）and Raman spectroscopy. Both graphite and Pt appeared good chemical stability, and typical undoped DLC films weredeposited. Doping DLC films were obtained using Cu anode due to corrosion in the mixed solution, however, no car-bon films could be found by anode made of stainless steel under the same experimental parameters. The characterizations suggested that anode materials have obvious influence on DLC films electrochemical deposition, including filmgrowth rate, morphology, composition and microstructure. Both the type of resulting DLC films and stability of anodematerial against organic solution should be considered when choosing anode in liquid electrochemical deposition of DLCfilms.