摘要
一种用于 BGA(Ball Grid Array)共面性检测的激光扫描在线测试系统 ,对扫描中的动态误差进行了实时修正 ,提出了以三点法为基础的共面性评价方法 ,并进行了相应的实验研究 。
A laser scanning on-line inspection system used for BGA(Ball Grid Array) coplanarity measurement is introduced. The dynamic errors in scanning are corrected in real-time. A coplanarity evaluation method based on three-point method is proposed. The corresponding experimental investigations are carried out and satisfactory results are achieved.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2001年第1期39-42,共4页
Opto-Electronic Engineering
基金
国家自然科学基金资助项目 !(6990 60 0 1
关键词
在线测试系统
球栅阵列芯片
激光扫描
BGA
共面性检测
Computer simulation
Control systems
Fabry
Perot interferometers
Fuzzy control
Interferometry
Mathematical models
Nanotechnology
