高精度长光栅动态检测的新方法

A New Method for Dynamic Measurement of High-Accuracy Linear Grating

根据双频激光干涉测量原理，针对进口设备ＨＰ５５２８激光干涉仪不能进行动态检测的缺点。提出了一种改进ＨＰ５５２８激光干涉仪并实现高精度长光栅动态检测的新方法。论述了长光栅长度误差的检测和长光栅莫尔条纹信号质量的检测。其中包括激光信息处理、信号采集、计算机接口和算法。该方法不仅可以检测光栅尺的精度，还可以通过信号分析了解光栅尺制造过程中的误差源对光栅尺制造精度的影响，也可以实现对磁栅、线纹尺等长度计量元件进行高精度动态测量。

Based on the principle of double frequency laser interference measurement ofhigh accuracy linear grating. This technique is discussed in detail from two aspots:totol lenth cumu-lative error measurement and Morie fringe signal quality analysis of linear grating.It includes lasersignal processing tochnique, signal sampling,computer interface circuit and related algorithm. withthis methed, we can not only get its accuracy parameter of a linear grating, but aiso analyze the er-ror factors which would affect the accuracy of a linear grating in graving process. In addition,it cancny out dynamic measuremtns for other length metrological elements.