N-P型半导体气敏元件的理论分析

Study on Gas Sensors of N-P Structural Patten in Theory

本文提出了一种新型结构气敏元件,即N-P型半导体组合气敏元件。理论分析表明,该种元件可实现灵敏度的倍增,从而有效地提高气敏元件的灵敏度,实现ppb级的检测。此外,在一定条件下,该种元件还可提高选择性和热稳定性,缩短初期弛豫时间。

' A gas sensor of a new type is put forth is this paper. This gas sensor in of N-P structural pattern and works with a high sensitivity. The results in vestigated from theortical viewpoint showed that under conditons , the sensitivity of the compound gas sensor is equal to the multiplication product of the respective sensitivity of two sensitive bodies N and P. The other advantages of this gas sensor over other gas sensors are that it probably has a higher selectivity and thermostability and a smaller zero drift.