摘要
本文对超净介质中颗粒污染物光学检测的基本原理、技术特性、应用范围、技术现状及发展动向作了总体性阐述.
The rapid development of science and technology and modern industry causes a demand for a higher level of the purity of many mediums, which, in turn, causes a demand for a higher level of the technology of measuring and controlling the impurities in mediums.This paper makes a general review of the basic principle, technical characters, applied fields,technical state and developing tendency of the optical technology of sizing particle impurity in ultrapure mediums.
关键词
超净介质
杂质控制
光学测量
颗粒污染物
ultrapure mediums
impurity controlling
particle
optical measuring