超净介质中颗粒污染物光学检测技术的进展

The development of optical technology on measuring particle impurity in ultrapure medium

本文对超净介质中颗粒污染物光学检测的基本原理、技术特性、应用范围、技术现状及发展动向作了总体性阐述．

The rapid development of science and technology and modern industry causes a demand for a higher level of the purity of many mediums, which, in turn, causes a demand for a higher level of the technology of measuring and controlling the impurities in mediums.This paper makes a general review of the basic principle, technical characters, applied fields,technical state and developing tendency of the optical technology of sizing particle impurity in ultrapure mediums.