电容式石英膜盒压力传感器的研制

Development of Capacitive Type of Quartz Bellows-Gauge

本文介绍了电容式石英膜盒压力传感器工作原理、石英膜盒结构设计和加工工艺。对配用的测试电路也做了说明,整体石英弹性膜盒的研制成功为脆性材料弹性化开拓了应用新途径并为大气压力无汞测量提供了新的敏感器件。

In this paper the principles of fused quartz capsule capadtive pressure sensor is introduced. Its structure and measurement circuit are also shown. The development of this sensor breaks a new path for measuring atmasphere pressure without mercury