基体硬度对氮化钛沉积表面复合硬度的影响

Effects of Substrate Hardness on Compound Hardness of TiN Depositing Surface

本文研究了基体硬度、沉积氮化钛薄膜硬度和薄膜厚度对表面硬度的影响,通过不同的氮化钛沉积工艺,建立基体硬度、薄膜硬度、薄膜厚度与氮化钛沉积表面复合硬度之间的关系.

In this paper,the effects of the substrate hardness,the film hardness, and the film thickness on the compound hardness of TiN depositing surface have been investigated.In order to set up the relation of the substrate hard- ness,the film hardness,and the film thickness to the Compound hardness,a series of coating experiments with different technological parameters have been carried out.