ZrO_2膜的相结构与显微组织

Crystal structure and microstructure of ZrO_2 thin film.

用 X射线衍射和扫描电镜研究了 Zr O2 膜的晶体结构和显微组织。结果表明 Zr O2 膜的相结构为立方氧化锆 (c- Zr O2 ) ,晶粒尺寸细微。发现 Zr O2 膜中存在具有 (111)面织构的柱状晶结构 。

The Crystal structure and microstructrue of ZrO 2 thin film is investigated by means of X ray diffraction and scanning electron microscopy. The result show that the crystal structure of ZrO 2 film is of cubic Zirconia (c ZrO 2) structure and the grain size is very fine. A Columnar structure with (111) plane texture is observed and it can be subdued by applying bias voltage of-70 V on substrates. (4 refs.)