钙离子注入钛表面及其微观分析

MICROCOSMIC ANALYSIS OF CALCIUM-ION-IMPLANTED TIANIUM

目的 研究改性后钛表面的结构和化学组成．方法 以１×１０１８， ５×１０１７ 和１×１０１７ 离子／ｃｍ２的注入量将钙离子注入到纯钛表面，并对其进行Ｘ射线光电子能谱及扫描电镜分析．结果 得到了ＸＰＳ全谱、结合能值以及扫描电镜照片，并用高斯拟合对材料表面可能存在的元素化学状态进行了分析．结论 离子注入可成功地将无机钙离子引入到纯钛材料表面，形成含有多种钙、钛氧化物的表面改性层．由该方法引入的钙在材料表面分布均匀且牢固，是一种具有应用前景的材料改性方法．

Objective To study the physical structure and the chemical composites of the surface-modified titanium. Methods The surface of titanium before and after calcium-ion implanted by amounts of 1×1018, 5×1017 and 1×10 17 ions·cm-2, has been c haracterized using X-ray photoelectron spectroscopy (XPS) and scanning electron microscope (SEM). Results The wide XPS profile, the binding energy data and th e SEM photos has been obtained. The possible chemical state has been speculated by the Gauss matching analysis. Conclusions The XPS data reveal that the struct ure of the surface modified layer of calcium-ion-implanted titanium is TiO2 containing a complex oxide of calcium and titanium near the surface.. The SEM Ph otos show that these calcium complex are equably and firmly distributed on the t itanium surface.