摘要
损伤敏感性是CMOS器件的电离辐射损伤等效研究中的一个特征参量,这个参量是辐照总剂量、剂量率、辐射类型、能量、管子类型、偏置条件、电源电压等的复杂函数。本文主要研究总剂量和剂量率响应特性。实验证实,CMOS器件的损伤敏感性与电离辐照的总剂量基本无关,对剂量率的依赖也很弱。
Damage sensitivity, a characteristic parameter in the study of ionizing radiation damage equivalence in CMOS devices, is a complex function of total dose, dose rate, radiation source, particle energy, supply voltage, gate bias and transistor type. In this paper mainly reported is the responses of total dose and dose rate. Under our experimental conditions, it is found that damage sensitivity for CMOS devices is almost independent of total dose and only have a weak dependence on dose rate.
出处
《核技术》
CAS
CSCD
北大核心
1991年第12期750-755,共6页
Nuclear Techniques
基金
国家自然科学基金
关键词
CMOS器件
损伤等效
损伤敏感性
Damage equivalence Damage sensitivity Total dose Dose rate