微机械加工中的RIE技术

Reactive Ion Etching for Micromechanical Manufacture

简述了反应离子刻蚀(RIE)技术在微型传感器部件加工制造中的应用,报道了采用NF_3、SF_6等气体反应离子刻蚀Si的实验结果,研制出了φ300μm的微型Si齿轮。

The application of reactive ion etching (RIE) technigue to microme-chanical manufacture of transducers is briefly presented.Experimental results of RIE of Si using VF3 and SF8 gases are reported,By means of RIE technigue gears with a diameter of 300μm are obtained.