PI/CAB复合介质膜湿敏元件敏感特性研究

A Study on Sensitive Character of PI/CAB Bilayer Film in Capacitive Humidity Sensor

本文提出一种新型电容式复合介质膜湿敏元件 ,它的介质膜是将线性输出、温度特性取向不同的两类感湿介质膜 ( PI,CAB)互补复合而成 .对比试验表明 ,复合介质膜湿敏元件具有优异的线性输出 ,并对温度系数。

A new capacitive humidity sensitive device of the bilayer dielectric film is developed. It is fabricated by using two humidity sensitive dielectric films (CAB.PI) with line output and temperatue specialty on opposite direction as a result, the compensation can be realized. The experiment result illustrates that the capacitive humidity sensitive device of the bilayer dieletric film has good characters of line arity output. Its temperatue coeffeient, repeatability and long term stability are greatly improved.