扩散泵返油的Monte Carlo模拟

MONTE CARLO SIMULATION OF DIFFUSION PUMP OIL BACKSTREAMING

本文用气体动力学分析了油蒸汽的超音速流动,得到扩散泵喷嘴出口油蒸汽的流动规律。运用Monte Carlo方法对喷嘴出口区域的返油进行模拟,从而得出扩散泵返油主要是蒸汽流宏观喷射速度与热运动速度合成造成的,并给出了减少扩散泵运油的措施。理论分析与实验结果比较吻合。

In this paper, we analysed supersonic speed flow of oil steam with using Air Dynamics and required the flow law of oil steam at the edge of the nozzle end. We simulated and caculated the oil backstreaming at the edge of the nozzle end with using Monte Carlo methods, and required that oil backstreaming of diffusion pump is couscd mainly by the compounding of the macroscopic moving velocity and heat moving velocity of the oil moleculars, and pointed out the measures decreasing oil backstreaming of diffusion pump. To tally comparatively with expriment result.