硅压力传感器的可靠性试验方法及失效分析

Reliability test method and failure analysis for silicon pressure transducer

通过对一种特定结构的硅压力传感器进行动态综合应力寿命试验 ,探讨了硅压力传感器的可靠性实验方法 ;并对失效样品进行了解剖分析 ,研究了它在温度、电压和压力共同作用下的失效机理 ,分析了产品设计、工艺与可靠性的关系 ,提出了相应的改进措施。

By the test of comprehensive stress lifespan of silicon pressure transducer with special constructure,the method of reliability test is discussed,and the failure samples are analysed.Its reason of failure under the condition of the action of temperature,voltage and pressure together is studied.In addition,the relation between the design and technique of product and reliability are analysed,the correspending improvement methods are propounded.