摘要
根据亚微米电子束曝光机束斑直径、束流大小与各磁透镜电流之间的关系以及刀口法测试束斑的原理，设计了一套总线式的束斑自动测控系统。该系统以ＩＢＭ—ＰＣ／ＡＴ作为主控机，系统包括用于总线扩展的总线驱动板、电子束扫描控制板和束流信号数据采集板。
A automatic measuring and monitoring system of the beam spot has been designed on the base of the relation of spot diameter, beam current and lenses currents and the principle of measuring the beam spot by knife-edge method. The system has bus construction and uses IBM-PC/AT as master-computer, including the bus drive board for bus expanding, electron beam ecanning control board and beam current data acquisition board.
出处
《微细加工技术》
EI
1996年第4期16-22,共7页
Microfabrication Technology
关键词
电子束曝光机
束斑
自动测控系统
electron-beam exposure machine
beam spot
automatic measuring and monitoring
