悬空金属微条探头的制造

MANUFACTURE OF HANGING METAL MICRO STRIP DETECTOR

悬空金属微条是探测高能粒子和Ｘ射线的新型探测器──微条气体室的探测元件。由微细加工制备的金属微条尺寸及其相互的位置精度都可控制在微米量级，因此能够得到非常好的空间分辨率，并具有抗辐射、低成本等独特优点。

Hanging metal micro strip is the detecting device of a new detector-Micro Strip Gas Chamber (MSGC) for detecting high energy particles and X-ray. The size of the metal micro strips and their position accuracy can be controlled in the micron range by microfabrication method. Thus MSGC has very high space resolution, antiradiation ability and low cost.