摘要
采用热丝化学气相沉积生长出优异的金刚石薄膜。研究了薄膜的分层生长过程,薄膜的层状结构及膜厚随沉积时间的变化特性。
High quality diamond thin films were grown by hot-filament chemical vapor deposition. The gradational growth and layer by layer structure of diamond thin films, and the relationship between the thickness of films and the deposition timewere studied.
出处
《微细加工技术》
1996年第4期67-70,共4页
Microfabrication Technology
关键词
化学气相沉积
金刚石薄膜
分层生长
Chemical vapor deposition
diamond thin films
gradational growth
layer by layer structure