利用二维PSD器件测量小角度的研究 一种新型的自准直仪

Research of Dual Axis Small Angle Measurement Based on 2-D PSD A New Type Autocollimator

文章中对二维PSD用于二维小角度测量的研制的原理方法和试验结果作了介绍 ,同时对二维PSD自准直仪的性能特点也有较详细的分析论述 ,也为小角度测量仪器的开发提出了一种崭新的方法。

This paper introduced a new type autocollimator using the 2\|D Position Detector Sensors to measure the small angle of mirror target.This new apparatus and its excellent application performance also had been described in details.Testing data had been recorded and analysized.