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PD-1静电探针等离子体诊断系统 被引量:3

Electrostatic-probe plasma Diagnoses System PD-1
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摘要 本文简述了静电探针等离子诊断的基本原理,并且详细介绍了新型微机化的探针系 统。在该系统中,计算机代替人来完成探针特性的测试以及全部复杂运算,因而简化了 操作并大大加快了诊断速度。 The principles of the electrostatic-probe diagnosesfor plasma are simply described in this paper. And a new probe system with micro-computer is introduced in detail.In this system,the characteristics of the probe and the complicated calculations are carried out by the computer in stead of men. Therefore a high speed of diagnoses for plasma has been obtained. The operation of plasma diagnoses is simplified.
作者 韩利师
出处 《真空》 CAS 北大核心 1990年第1期7-12,39,共7页 Vacuum
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